+1 vote
in Linear Integrated Circuits by (37.1k points)
The process involved in photolithography is

(a) Making of a photographic mask only

(b) Photo etching

(c) Both photo etching and making of photographic mask

(d) None of the mentioned

The question was asked during an interview.

My question is from Basic Planar Process in section IC Fabrication of Linear Integrated Circuits

1 Answer

0 votes
by (39.8k points)
The correct option is (c) Both photo etching and making of photographic mask

Let me elaborate: Photolithographic involves both processes in sequence. First photographic mask is used for artwork and reduction. Then Photo etching for removal of SiO2 from designed region.

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