+1 vote
in Linear Integrated Circuits by (37.1k points)
Which component is not used as an impurity in diffusion process?

(a) Phosphorous

(b) Boron chloride

(c) Phosphorous pentaoxide

(d) Boron oxide

This question was posed to me in final exam.

My enquiry is from Basic Planar Process in section IC Fabrication of Linear Integrated Circuits

1 Answer

0 votes
by (39.8k points)
The accurate option is (a) Phosphorous

Paint a vivid picture of understanding with: Elemental form of Phosphorous is not added directly as an impurity in diffusion process.

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