Ask a Question

Mention the chemical reaction for oxidation process

← Prev Question Next Question →
+1 vote
in Linear Integrated Circuits by (37.1k points)
Mention the chemical reaction for oxidation process

(a) Si + 2H2O –> SiO2 + 2H2

(b) Si + O2 –> SiO2

(c) 2Si + 2H2O –> 2SiO2 + 2H2

(d) 2Si + 2H2O + 2O2 –> 2SiO2 + 2H2 + O2

The question was posed to me in class test.

My question comes from Basic Planar Process topic in section IC Fabrication of Linear Integrated Circuits

1 Answer

0 votes
by (39.8k points)
Correct answer is (a) Si + 2H2O –> SiO2 + 2H2

Unlock profound understanding with: For oxidation process, silicon wafers are heated to a high temperature and simultaneously they are exposed to a gas containing H2O or O2 or both.

Related questions

We welcome you to Carrieradda QnA with open heart. Our small community of enthusiastic learners are very helpful and supportive. Here on this platform you can ask questions and receive answers from other members of the community. We also monitor posted questions and answers periodically to maintain the quality and integrity of the platform. Hope you will join our beautiful community

Categories

Powered by TalkJarvis
...