Find the coating material used for photo etching process along with its thickness range.
(a) Kodak photoresist (5000-10000Å)
(b) Kodak photoresist (1000-5000Å)
(c) Kodak photo etchant (1000-5000 Å)
(d) Kodak photo etchant (500-1000 Å)
I had been asked this question by my college director while I was bunking the class.
This question is from Basic Planar Process in section IC Fabrication of Linear Integrated Circuits