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Oxidation process in silicon planar technology is also called as

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in Linear Integrated Circuits by (37.1k points)
Oxidation process in silicon planar technology is also called as

(a) Photo oxidation

(b) Silicon oxidation

(c) Vapour oxidation

(d) Thermal oxidation

This question was addressed to me in semester exam.

My enquiry is from Basic Planar Process in division IC Fabrication of Linear Integrated Circuits

1 Answer

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by (39.8k points)
Accurate choice is (d) Thermal oxidation

Unlock profound understanding with: The oxidation process is called thermal oxidation process because high temperature is used to grow the oxide layer.

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