Question

In the fabrication of monolithic ICs, Boron chloride is added as an impurity in the diffusion process. Find the diffusion time, if the furnace is heated up to 1200^oc.

(a) 1 hour

(b) 2 hours

(c) 45 minutes

(d) 30 minutes

I got this question by my school teacher while I was bunking the class.

My question is based upon Basic Planar Process in division IC Fabrication of Linear Integrated Circuits

Answer 1

Accurate choice is (b) 2 hours

Delve into insight with: In diffusion process, the depth of diffusion of impurities depends upon the time taken for diffusion, which normally extends for more than 2 hours.