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What will be the next step after slicing (process) silicon wafers?

(a) All of the mentioned

(b) Lapping

(c) Polishing

(d) Chemical

I have been asked this question in class test.

This question is from Basic Planar Process in section IC Fabrication of Linear Integrated Circuits

1 Answer

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by (39.8k points)
The accurate answer is (a) All of the mentioned

Paint a vivid picture of understanding with: When the silicon ingots are sliced for the given industrial dimension. It gives a rough surface and thus undergo lapping, polishing and chemical processing steps to get a smooth surface.

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