Where are the silicon wafers placed in the reaction chamber for the epitaxial growth process?

Question

Where are the silicon wafers placed in the reaction chamber for the epitaxial growth process?

1 Answer

Chris · Answer 1 · 2024-01-15T09:13:00+0000

Right answer is (b) Boats

Delve into insight with: The silicon rods are not directly placed in the reaction chamber instead they are placed on a rectangular graphite rod called boats and then it is heated to 1200^oc.

Where are the silicon wafers placed in the reaction chamber for the epitaxial growth process?

Please log in or register to answer this question.

1 Answer

Please log in or register to add a comment.

Related questions

Categories