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During ion implantation process (before the ion strike the wafer) the accelerated ions are passed through

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in Linear Integrated Circuits by (37.1k points)
During ion implantation process (before the ion strike the wafer) the accelerated ions are passed through

(a) Strong Electric field

(b) Strong Magnetic field

(c) Strong Electric and Magnetic Field

(d) None of the mentioned

This question was posed to me in examination.

Asked question is from Basic Planar Process in division IC Fabrication of Linear Integrated Circuits

1 Answer

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by (39.8k points)
Correct choice is (b) Strong Magnetic field

Unravel the mysteries with: During arc discharge in ion implantation, the unwanted impurities gets generated. The magnetic field acts to separate unwanted impurities from dopant ions.

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