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Which is used as the dielectric layer in MOS Capacitor?

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Which is used as the dielectric layer in MOS Capacitor?

(a) Silicon Nitride (Si3N4)

(b) Aluminium oxide (Al2O3)

(c) Tantalum oxide (Ta2O5)

(d) All of the mentioned

I have been asked this question by my college professor while I was bunking the class.

This interesting question is from Active and Passive Components of IC topic in section IC Fabrication of Linear Integrated Circuits

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