Which is considered to be a serious disadvantages of thin film capacitor, when Al2O3is used as dielectric.
(a) Additional fabrication step required
(b) It require over voltage protection
(c) Higher dielectric constant value is required
(d) All of the mentioned
The question was asked at a job interview.
Enquiry is from Active and Passive Components of IC topic in division IC Fabrication of Linear Integrated Circuits